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Scanning microwave impedance microscope (SMM)
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High sensitivity high vacuum scanning extended resistance microscope (SSRM)
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Atomic force microscope (AFM)
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Conductive atomic force microscope (CAFM)
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Scanning electron microscope (SEM-EDS)
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Transmission electron microscope (TEM-EDS)
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Focused Ion Beam (FIB)
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Scanning Capacitor Microscope (SCM)
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Reverse Engineering
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Atomic force microscope (AFM)
[Summary] AFM uses the Van Der Waals Force between atoms to present the surface characteristics of the sample. It is a commonly used efficient means for surface structure analysis. It is divided into contact and tap modes according to the different materials measured.Our company's AFM test can measure the sample slope roughness, solve customer pain points and difficulties。
Application 1: Structural dimension characterization

The figure above is a dimensional measurement of the silicon surface with a stepped structure. From the measurement curve (c) it can be seen that it is an upward trend from left to right.
Application 2: Structural morphology analysis


The above figure is a three-dimensional schematic diagram measured after selective deposition of metal lines on the silicon surface. From the right figure, it can be clearly seen that the metal lines in some areas are discontinuous, and a large number of micro particles of varying sizes are attached to the overall surface.