Scanning Capacitor Microscope (SCM)
【overview】Scanning Capacitance Microscopy/SCM is a nanoscale electrical characterization tool based on scanning probe microscopy (SPM) technology. It mainly detects the capacitance changes between the probe and the sample to achieve high-resolution imaging of local electrical characteristics of the material (such as carrier concentration, dielectric constant, interface potential, etc.). Its core advantage lies in combining capacitance measurement with nano-level spatial resolution, providing a unique means for microelectronics research in the fields of semiconductor devices, nanomaterials, etc.
