Scanning microwave impedance microscope (SMM)

【overview】SMM (Scanning Microwave Microscope) irradiates microwaves onto a sample and uses the phase and amplitude of the reflected wave to analyze and obtain electrical information such as conductivity, dielectric constant, carrier concentration and type when measuring the sample. It can be used in the research and development of materials in a variety of fields, such as semiconductor materials, insulating materials, thin film materials, etc. In addition, our company can also provide scanning microwave impedance microscopy (Scanning Microwave Impedance Microscope (SMIM) testing services.

Application one:Testing SRAM samples to produce high-resolution images

Application 2: Measurement of cross-sectional morphology and carrier concentration distribution of CMOS devices

SMM can be used to measure the cross-sectional morphology and carrier concentration distribution of CMOS devices to help determine whether the ion implantation and diffusion processes meet the target.

Application three:Device failure location and fault analysis

After using hot spot location to find the fault location of the device, the failed tube is located through SMM scanning, and the point where the diffusion anomaly causes bridging is determined by checking the carrier distribution.