Focused Ion Beam (FIB)
【Overview】The full name of FIB is Focused Ion Beam, a nano-scale processing and analysis technology based on high-energy ion beams.. Its main functions include fixed-point cutting, material evaporation, etching, etc.Our company has corresponding testing plans for both low-level (copper process, aluminum process) and high-level processes.
The working principle of FIB is to accelerate the ion beam generated by a liquid metal ion source (which is more common with gallium Ga as the ion source material) and focus on the sample surface with extremely high accuracy; by controlling the electric field and magnetic field, the ion beam can be accurately moved on the sample surface, generate a secondary electron signal to obtain electron images, or peel off the surface atoms with a strong current ion beam to complete the micro and nano-scale surface morphology processing.
TEM sample preparation example:
