Transmission electron microscope (TEM-EDS)
【Summary】 Unlike scanning electron microscopes, Transmission Electron Microscope (TEM) is a high-resolution, high-magnification electron optical instrument that uses high-speed, concentrated electron beams emitted by electron guns to irradiate to very thin samples to collect transmitted electrons and image transmitted electrons through multi-stage magnification of electromagnetic lenses.
Application 1: Chip structure analysis
As shown in the figure, the TEM diagram of the 22nm Fin FET structure is shown in
Application 2: Element composition analysis
As shown in the figure, the mapping of up to 11 elements with device cross-sections was observed using TEM-EDS.