Conductive atomic force microscope (CAFM)
[Overview] High vacuum and high sensitivity CAFM (Conductive AFM/Conductive Atomic Force Microscope) is a cutting-edge technology that takes into account both the fixed-point electrical characteristics technology of nanoprobes and the visualization of two-dimensional conductive distribution. It has a high spatial resolution and can detect nanoscale phenomena such as local defects and small currents. In addition, the analysis of media properties can be carried out, which is widely used in the study of thin film breakdown models and SiC substrates, etc.
Application 1 Use CAFM in image RL0and RL1The slope of the resistance between the two layers of graphene can be approximated
Application 2: Using contrast of the contrast of the CAFM current distribution map (left image) to find the extremely thin multilayer graphene (MLG) components covering the substrate that were not completely found in the BSE-SEM map (right image) at the same position.
Application 3: Using CAFM to analyze the evolution mechanism of the breakdown of the gate insulating film, it can also be used to understand the failure principle of various new high-k insulating films.
Application 4 Determination of surface morphology and electrical distribution of boron-doped homoepitaxial diamond (fourth generation semiconductor) using CAFM
