Han Chen, Yinfeng Long, Shiyu Zhang, Kai Liu, Mingfeng Chen, Jinxiu Zhao, Mengwei Si, and Lin Wang


In this article, the specific application scenarios and functions of scanning microwave impedance microscopy SMIM are as follows:
- Characterizing the dielectric properties of CCPS: Using sMIM technology combined with finite element simulation (FEA), the relative dielectric constant of van der Waals ferroelectric material CuCrP₂S₆ (CCPS) was quantitatively measured and found to be thickness-independent in the thickness range of 6-70 nm, with a value stable at ≈35. This result is consistent with the capacitance-voltage (C-V) measurement, providing key parameters for subsequent device capacitance matching design.
- Obtain CCPS thickness-signal relationship: Extract the signal contrast between CCPS nanosheets and Au substrate through sMIM imaging, and observe a quasi-inverse relationship between signal and thickness, which further assists the quantitative analysis of dielectric constant and clarifies the thickness adaptation range of CCPS as a gate dielectric material.
- Support NC-FET device design: Based on the dielectric constant of CCPS (≈35) measured by sMIM, combined with the dielectric constant of MoS₂ (≈7), the thickness matching conditions of CCPS and MoS₂ are derived (T_CCPS ≤ (T_MoS₂・ε_CCPS)/ε_MoS₂), in order to optimize the NC-FET device structure, achieve hysteresis-free characteristics and ultra-steep sub-threshold swing (≈12 mV/dec) provides data support.